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Princeton University Library Catalog
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Handbook of thin film technology / Hartmut Frey, Hamid R. Khan, editors.
Format
Book
Language
English
Published/Created
Berlin : Springer, [2015]
Description
xiii, 379 pages : illustrations ; 26 cm
Availability
Available Online
Springer Nature - Springer Chemistry and Materials Science eBooks 2015 English International
Copies in the Library
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Call Number
Status
Location Service
Notes
Harold P. Furth Plasma Physics Library - Stacks
TA418.9.T45 H363 2015
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Details
Subject(s)
Thin films
—
Handbooks, manuals, etc
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Editor
Frey, Hartmut
[Browse]
Khan, H. R.
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Restrictions note
Includes bibliographical references and index.
Contents
Applications and developments of thin film technology
Importance of the vacuum technology for thin film coatings
Evaporation in the vacuum
Basic principle of plasma physics
Gaseous phase and surface processes
Coating by cathode sputtering
Plasma treatment methods
Ion beam-supported procedures
Chemical Vapor Deposition (CVD)
Physical basics of modern methods of surface and thin film analysis
Measurements of thin layers during the coating
Measurements of thin layers after terminated coating process
Nanoparticle Films
Optical properties of thin films.
Show 11 more Contents items
ISBN
9783642054297
3642054293
LCCN
2015934012
OCLC
913832246
Statement on language in description
Princeton University Library aims to describe library materials in a manner that is respectful to the individuals and communities who create, use, and are represented in the collections we manage.
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Handbook of Thin Film Technology [electronic resource] / edited by Hartmut Frey, Hamid R. Khan.
id
99125422155906421