Princeton University Library Catalog

Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.

Author:
International Symposium on Silicon Science (5th : 2009 : Kiryū-shi, Japan) [Browse]
Format:
Book
Language:
English
Published/​Created:
Stafa-Zurich ; Enfield, NH : Trans Tech Publications, 2011
Description:
xii, 282 p. : ill. ; 25 cm.
Series:
  • Key engineering materials ; v. 459. [More in this series]
  • Key engineering materials, 1013-9826 ; v. 459
Bibliographic references:
Includes bibliographical references and indexes.
Subject(s):
Other title(s):
  • 5th International Symposium on Silicon Science
  • Fifth International Symposium on Silicon Science
  • International Symposium on Silicon Science
  • 1st International Conference on Advanced Micro-Device Engineering
  • First International Conference on Advanced Micro-Device Engineering
  • International Conference on Advanced Micro-Device Engineering
  • ISSS & AMDE 2009
  • ISSS 2009
  • AMDE 2009
ISBN:
  • 9780878492176
  • 0878492178
LCCN:
2012405162
OCLC:
701026765
Related name:
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TK7871.15.S55 S56 2009 Browse related items